MEMS device having a suspended diaphragm and manufacturing process thereof

摘要

A MEMS device wherein a die of semiconductor material has a first face and a second face. A diaphragm is formed in or on the die and faces the first surface. A cap is fixed to the first face of the die and has a hole forming a fluidic path connecting the diaphragm with the outside world. A closing region, for example a support, a second cap, or another die, is fixed to the second face of the die. The closing region forms, together with the die and the cap, a stop structure configured to limit movements of the suspended region in a direction perpendicular to the first face.

主权项

1. A MEMS device comprising:
a first die of semiconductor material having a first face and a second face, the first die having:
a suspended region;a trench;a peripheral region that is separated from the suspended region by the trench;elastic elements located in the trench and elastically coupling the suspended region to the peripheral region;a diaphragm formed in the first die or coupled to the suspended region and facing the first face; anda stop structure on the second face; a first cap coupled to the first die, facing the first face of the first die and overlying the first die at least over the suspended region and the trench; a fluidic path that fluidly couples the diaphragm to an environment external to the device; and a closing body fixed to the second face of the first die and facing the stop structure, the closing body and the stop structure configured to limit movement of the suspended region above a threshold value in a direction perpendicular to the first face.