| 摘要 |
Provided is a levitation transport apparatus capable of levitating and transporting a substrate without damaging the substrate. The levitation transport apparatus (1) comprises: a levitation stage (2) for levitating a substrate W; a hand unit (51) having a contact unit (53) which is in contact with an end surface of the substrate W, and gripping the substrate W by allowing the contact unit (53) to be in contact with an end of the substrate W levitated by the levitation stage (2); and a moving device (52) for moving the hand unit (51) in a transporting direction of the substrate W. A substrate levitation surface (23), which is a surface for levitating the substrate W of the levitation stage (2), has the width smaller than the width of the substrate W with respect to the width direction which is orthogonal to the transporting direction, and when the hand unit (51) grips the substrate W, the contact unit (53) is in contact with the substrate W on an outer side more than the substrate levitation surface (23) with respect to the width direction, and a lower end of the contact unit (53) is positioned lower than the substrate levitation surface (23). |
