| 主权项 |
1. A spectroscopic measurement apparatus that is configured to execute processes by a processor, the spectroscopic measurement apparatus comprising:
a wavelength tunable interference filter including
a first substrate,a second substrate disposed to face the first substrate,a first reflection film that is provided above the first substrate, reflects part of incident light, and transmits part of the incident light,a second reflection film that is provided above the second substrate, reflects part of incident light, transmits part of the incident light, and is disposed to face the first reflection film with a gap interposed therebetween, andan actuator configured to change a gap value of the gap by applying a voltage to bend the second substrate toward the first substrate; a light detector configured to detect a light level of light picked up by the wavelength tunable interference filter and that outputs a detection signal reflecting the light level; and a measurement controller including
a filter driver configured to drive a drive voltage to the actuator to change the gap,a storage configured to store a digital signal, which corresponds to the detection signal output from the light detector, for a predetermined period so that a light level detection pattern is obtained, anda target light level acquisition unit configured to acquire a target light level of the light that passes the wavelength tunable interference filter when the second substrate is positioned at an oscillation center based on a natural oscillation cycle of the second substrate based on timings when a maximum light level and a minimum light level are detected from the light level detection patterns, wherein the target light level acquisition unit is configured to acquire the following light levels from the light level detection patterns: the maximum light level; the minimum light level; a first light level at a point time one-fourth the natural oscillation cycle before a maximum detection timing when the maximum light level is detected; a second light level at a point of time one-fourth the natural oscillation cycle after the maximum detection timing when the maximum light level is detected; a third light level at a point of time one-fourth the natural oscillation cycle before a minimum detection timing when the minimum light level is detected; and a fourth light level at a point of time one-fourth the natural oscillation cycle after the minimum detection timing when the minimum light level is detected, and the target light level acquisition unit is configured to acquire the target light level based on a relative relationship among the first light level, the second light level, the third light level, and the fourth light level. |
