| 摘要 |
PROBLEM TO BE SOLVED: To provide a double diaphragm type pressure sensor capable of reducing the increase of inner pressure due to temperature change.SOLUTION: The double diaphragm type pressure sensor includes: a pressure sensor unit 4 mounted on a bottom 21b of a metal container 21 which has a concave part; a metal diaphragm 23 that is air-tightly bonded to an opening 21a of the concave part of the container 21; a pressure transmission medium 24 filled in a space formed by the metal diaphragm 23 and the concave part of the container 21; and a metal terminal 26 that penetrates through the bottom 21b of the container 21 being electrically isolated from the container 21 in an airtight state. The double diaphragm type pressure sensor is configured to output an electric signal to the outside, which represents external pressure which is detected and converted into the electric signal by the semiconductor pressure sensor unit 4. |
