Microwave resonant cavity

摘要

A microwave resonant cavity is provided. The microwave resonant cavity includes: a sidewall having a generally cylindrical hollow shape; a gas flow tube disposed inside the sidewall and having a longitudinal axis substantially parallel to a longitudinal axis of the sidewall; a plurality of microwave waveguides, each microwave waveguide having a longitudinal axis substantially perpendicular to the longitudinal axis of the sidewall and having a distal end secured to the sidewall and aligned with a corresponding one of a plurality of holes formed on the sidewall; a top plate secured to one end of the sidewall; and a sliding short circuit having: a disk slidably mounted between the sidewall and the gas flow tube; and at least one bar disposed inside the sidewall and arranged parallel to the longitudinal axis of the sidewall.

主权项

1. A microwave resonant cavity, comprising:
a sidewall having a generally cylindrical hollow shape and formed of a material opaque to a microwave; a gas flow tube disposed inside the sidewall, formed of a material transparent to a microwave, and having a longitudinal axis substantially parallel to a longitudinal axis of the sidewall; a plurality of microwave waveguides, each said microwave waveguide having a longitudinal axis substantially perpendicular to the longitudinal axis of the sidewall and having a distal end secured to the sidewall and aligned with a corresponding one of a plurality of holes formed on the sidewall; a top plate formed of a material opaque to a microwave and secured to one end of the sidewall; and a sliding short circuit including:
a disk formed of a material opaque to a microwave and slidably mounted between the sidewall and the gas flow tube, the disk having an outer rim snuggly fit into the sidewall and a hole into which the gas flow tube being snuggly fit; andat least one bar disposed inside the sidewall and arranged parallel to the longitudinal axis of the sidewall, whereby a space defined by the top plate, sidewall, and the disk is adjusted to form a microwave resonant cavity inside the gas flow tube by moving the bar along the longitudinal direction of the sidewall.