Plasma processing apparatus and substrate processing method

摘要

A microwave supply unit 20 of a plasma processing apparatus 11 includes a stub member 51 configured to be extensible from the outer conductor 33 toward the inner conductor 32. The stub member 51 serves as a distance varying device for varying a distance in the radial direction between a part of the outer surface 36 of the inner conductor 32 and a facing member facing the part of the outer surface of the inner conductor 32 in the radial direction, i.e., the cooling plate protrusion 47. The stub member 51 includes a rod-shaped member 52 supported at the outer conductor 33 and configured to be extended in the radial direction; and a screw 53 as a moving distance adjusting member for adjusting a moving distance of the rod-shaped member 52 in the radial direction.

主权项

1. A plasma processing apparatus comprising:
a processing chamber, having a top opening, configured to perform therein a plasma process on a processing target substrate; a gas supply unit configured to supply a plasma processing gas into the processing chamber; a mounting table that is provided within the processing chamber and is configured to mount the processing target substrate; a microwave generator configured to generate a microwave for plasma excitation; a dielectric plate placed for sealing the processing chamber hermetically by covering the top opening of the processing chamber and configured to transmit the microwave into the processing chamber; a slot antenna plate, having a plurality of slot holes, provided on the dielectric plate and configured to radiate the microwave into the dielectric plate; a wavelength shortening plate provided on the slot antenna plate and configured to propagate the microwave in a radial direction; and a microwave supply unit configured to supply the microwave generated by the microwave generator to the slot antenna plate, wherein the microwave supply unit comprises: a coaxial waveguide including a substantially circular rod-shaped inner conductor whose one end is connected to a center of the slot antenna plate and a substantially cylindrical outer conductor provided outside the inner conductor with a gap therebetween in a radial direction; and a distance varying device disposed proximate an upper surface of the wavelength shortening plate and configured to vary a distance between a part of an outer surface of the inner conductor and a facing member facing the part of the outer surface of the inner conductor in a radial direction, wherein the distance varying device includes at least one stub member extensible from the outer conductor toward the inner conductor in an obliquely downward direction so that a leading end of the stub member is extended to be closer than a trailing end of the stub member, to the wavelength shortening plate.