| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of suppressing a reduction of detection accuracy.SOLUTION: When it is assumed that one direction in surface directions of a substrate 10 is a first direction and a direction in the surface directions orthogonal to the first direction is a second direction, a vibrating body 12 is supported in an outer peripheral portion 13 via a plurality of beam portions 16 to 17 including first beam constituent members 16a to 17a displaceable at least in the first direction and second beam constituent members 16b to 17b coupled to the first beam constituent members 16a to 17a and displaceable at least in the second direction. In at least part of the beam portions 16 to 17, the beam constituent members 16b to 17b near the outer peripheral 13 side are integrated among the first and second beam constituent members 16a to 17b. |
