SUBSTRATE PROCESSING SYSTEM, GATE VALVE, AND SUBSTRATE TRANSFER METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing system which can prevent its structure from being complicated.SOLUTION: A substrate processing system 10 comprises: five transfer modules 12 arranged in tandem; and two process modules 17 connected to each of the transfer modules 12. Each of the transfer modules 12 incorporates a transfer arm 16 for transferring a wafer W. Each of the process modules 17 performs various kinds of vacuum processing on the wafer W. At a joint part 18 between two transfer modules 12 adjacent to each other, a gate valve 23 that freely moves back and forth in a connection path 21 for making the insides of the two adjacent transfer modules 12 communicate with each other, and partitions the two adjacent transfer modules 12; and a wafer holding frame 26 that is attached to the gate valve 23 and supports the wafer W.