Oxide thin film transistor, method for fabricating TFT, display device having TFT, and method for fabricating the same

摘要

There are provided an oxide TFT, a method for fabricating a TFT, an array substrate for a display device having a TFT, and a method for fabricating the display device. The oxide thin film transistor includes: a gate electrode formed on a substrate; a gate insulating layer formed on the entire surface of the substrate including the gate electrode; an active layer pattern formed on the gate insulating layer above the gate electrode and completely overlapping the gate electrode; an etch stop layer pattern formed on the active layer pattern and the gate insulating layer; and a source electrode and a drain electrode formed on the gate insulating layer including the etch stop layer pattern and the active layer pattern and spaced apart from one another, and overlapping both sides of the etch stop layer pattern and the underlying active layer pattern.

主权项

1. An organic light emitting diode display device comprising:
a lower substrate on which a non-pixel region and a light emitting region are defined; a thin film transistor (TFT) formed in the non-pixel region of the lower substrate and including
a gate electrode,a gate insulating layer formed on the entire surface of the lower substrate including the gate electrode,an active layer pattern formed on the gate insulating layer above the gate electrode and completely overlapping the gate electrode, the active layer pattern formed of an oxide semiconductor,an etch stop layer pattern formed on the active layer pattern and the gate insulating layer,a source electrode and a drain electrode formed on the gate insulating layer including the etch stop layer pattern and the active layer pattern and spaced apart from one another, and overlapping both sides of the etch stop layer pattern and the underlying active layer pattern; a passivation layer formed on the entire surface of the lower substrate including the TFT; a plurality of color filter layers formed on the passivation layer of the light emitting region of the lower substrate; a dummy color filter layer pattern formed on the passivation layer of the non-pixel region of the lower substrate; an organic insulating layer formed on the entire surface of the lower substrate including the color filter layers and the dummy color filter layer pattern; drain electrode contact holes formed on the organic insulating layer, the dummy color filter layer pattern, and the passivation layer, and exposing the drain electrode of the TFT; a first electrode formed on the organic insulating layer and electrically connected to the drain electrode through the drain electrode contact hole; a bank layer formed on the organic insulating layer of the non-pixel region of the lower substrate; an organic light emitting layer formed on the entire surface of the lower substrate including the first electrode; and an upper substrate attached to an upper portion of the organic light emitting layer and having a second electrode formed thereon.