发明名称 APPARATUS AND METOD FOR CLEANING MASK OF ORGANIC LIGHT EMITTING DIODE
摘要 The present invention relates to an apparatus and method for cleaning a mask of an organic light emitting diode. The apparatus comprises: an inlet pipe to which a cleaning solution is fed from a cleaning bath; a storage body communicating with the inlet pipe and temporarily accommodating the cleaning solution; a recovery pipe for guiding the recovery of the cleaning solution stored in the storage body to the cleaning bath; a circulation pump installed in the inlet pipe and forcibly circulating the cleaning solution; and a magnetic means having a discharge unit in a hopper shape formed on a lower portion of the storage body, and in which a metal component mixed with the cleaning solution is captured on an outer circumferential surface of the discharge unit by a magnetic force. Accordingly, maintenance costs can be significantly reduced since configuring a highly expensive filter with a short replacement period can be omitted, and operation reliability of a product can be more enhanced since reducing the pressure for circulating and moving the cleaning solution is prevented in advance.
申请公布号 KR20160003476(A) 申请公布日期 2016.01.11
申请号 KR20140081962 申请日期 2014.07.01
申请人 DEVICEENG 发明人 PARK, CHON GU
分类号 H01L51/56;H01L21/302 主分类号 H01L51/56
代理机构 代理人
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