| 摘要 |
The present invention provides a cryopump suitable for high speed exhaust of a non-condensable gas such as hydrogen or the like. The cryopump (10) comprises: a cryopanel assembly (20); a radiation shield (30); and a radiation cover (32). The cryopanel assembly (20) includes a plurality of cryopanels, with each cryopanel having an absorption area (48) on both surfaces thereof. The radiation shield (30) forms a gas receiving space (50) surrounding the cryopanel assembly (20). The radiation cover (32) is arranged on an intake port (12). The radiation cover (32) comprises: a main plate (52); and a louver part (54). The main plate (52) is arranged on the intake port (12) to correspond to the cryopanel assembly (20). The louver part (54) is arranged on the intake port (12) to correspond to the gas receiving space (50). The radiation cover (32) without the louver part (54) may be allowed. |
