| 摘要 |
The present invention relates to an apparatus for generating vapor for a CVD or PVD equipment comprising two or more heat transfer bodies which are arranged continuously in the direction of flow of a carrier gas and have heat transfer surfaces, each of which can be heated to a heat transfer temperature, with a feeding pipe (4) feeding an aerosol to one of the heat transfer bodies for vaporization of the aerosol by bringing the aerosol particles into contact with the heat transfer surfaces. A provision is made that the heat transfer bodies include an aperture inserted with the feeding pipe (4) in an inside thereof, and the feeding pipe (4) includes a first flow channel (23) for feeding the aerosol and a second flow channel (24) for feeding a carrier gas in. At this time, gas passing apertures (29, 30) are provided through which the carrier gas can flow out from the second flow channel (24) to the first flow channel (23). Especially, the second flow channel (24) is closed in the area of the mouth (4′) of the feeding pipe. |
