| 摘要 |
According to the present invention, provided is a rail probe comprising: a moving rail; a pad including the rail; a probe unit moving along the rail, touching a spot for observation, and including a probe; a control unit which moves the rail, and controls the probe unit to move along the rail; and a driving unit which performs operation to move the rail through the control unit, and which enables the probe unit to correspondingly move along the moving rail. Accordingly, the present invention includes fewer probe units, thus simplifies a configuration of hardware and software. |
