发明名称 POROUS CZTS-BASED THIN FIOM AND ITS MANUFACTURING METHOD
摘要 The present invention provides a manufacturing method of a porous copper zinc tin sulfide (CZTS)-based thin film, wherein the manufacturing method comprises: a first step of mixing one or more precursors selected from a group consisting of a copper precursor, a zinc precursor, a tin precursor and sulfur or selenium with a solvent to make a CZTS-based precursor solution; a second step of coating the precursor solution on a substrate; a third step of pre-heating the coated thin film at a temperature of 200 to 400 deg. C; and a fourth step of heating the pre-heated thin film at a temperature of 500 to 600 deg. C under gaseous atmosphere including one or more selected from a group consisting of sulfur and selenium, wherein the solvent in the first step is a mixture solvent of deionized water or, deionized water and an alcohol-based solvent and the deionized water in the mixture solvent accounts for 70% by volume or greater and less than 100% by volume. In the manufacturing method of a porous CZTS-based thin film according to the present invention, morphology of a thin film, a grain size and porosity can be readily adjusted according to a temperature and a time through pre-heat treatment and post-heat treatment to control properties of a solar cell.
申请公布号 KR101583361(B1) 申请公布日期 2016.01.08
申请号 KR20140128425 申请日期 2014.09.25
申请人 DAEGU GYEONGBUK INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 SUNG, SHI JOON;PARK, SI NAE;KIM, DAE HWAN;KANG, JIN KYU
分类号 H01L31/046;H01L31/024;H01L31/0392;H01L31/18 主分类号 H01L31/046
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