| 摘要 |
The present invention relates to an SMIF loader device, which includes: a body (100) including a mesh net around the upper surface; a pod (200) comprising a pod cover (220) combined with and separated from the upper part of the body (100), and a pod plate (210) placing a reticle on the surface to accept the same, and storing/transferring the reticle; elevating members (300, 400) installed in the body (100), and separating the pod cover (220) and the pod plate (210) and vertically transferring the separated pod plate (210); and a suction device (500) installed in the body (100), and sucking particles (fine dust particles), generated when the upper surface of the body (100), the body (100), and the pod cover (220) are combined, and particles (fine dust particles), induced from the outside by an air current change when the elevating members (300, 400) are transferred to the bottom of the body (100). |
