METHOD OF DEPOSITING THIN FILM ON FLEXIBLE SUBSTRATE

摘要

According to the present invention, provided is a thin film laminating method to form a thin film on a flexible substrate. The method comprises the following steps of: generating stress with respect to the flexible substrate; forming a thin film on the substrate through a predetermined process while stress is generated with respect to the flexible substrate; and maintaining the substrate having the thin film formed thereon for a predetermined period of time. The method controls the time for maintaining the substrate to adjust resistance with respect to tensile stress of the thin film.