| 摘要 |
The present invention relates to a scanner for two-dimensional optical scanning and a manufacturing method thereof, wherein modulation of a resonance frequency caused by asymmetry of the scanner itself is used to perform two-dimensional driving via one input signal without an additional structure for modulation of the resonance frequency. In addition, the present invention relates to a manufacturing method of the scanner for two-dimensional optical scanning, wherein the scanner can be compactly packaged via a microelectromechanical systems (MEMS) process, thereby enabling miniaturization thereof, can be used in a micro-sized system such as an endoscope, has high precision, can be manufactured in various shapes, and has low production costs. Furthermore, the present invention relates to a medical imaging device using the scanner for two-dimensional optical scanning, which can provide an improved quality of a medical image having no interaxial crosstalk through division of a resonance frequency. |
