SPIN DEVICE FOR SEMICONDUCTOR MANUFACTURING PROCESS, MEDICAL DEVICE, PHYSICAL AND CHEMICAL APPLIANCES

摘要

A spin apparatus comprises: a mounting unit which is mounted with a wafer on the upper face thereof; a control unit which generates a control signal for driving a motor; a motor which rotates the mounting unit on which the wafer is mounted, on the basis of the control signal; and a display unit which displays driving data for each section of the motor and real-time driving information of the motor. The driving data for each section is data which sets the number of rotations to be driven for at least one section by the motor, and the real-time driving information is information displayed in association with the driving data for each section as the motor drives.