发明名称 |
Handle Substrate, Composite Substrate for Semiconductor, and Semiconductor Circuit Board and Method for Manufacturing the Same |
摘要 |
It is provided a handle substrate of a composite substrate for a semiconductor. The handle substrate is composed of a translucent polycrystalline alumina. A purity of alumina of the translucent polycrystalline alumina is 99.9% or higher, an average of a total forward light transmittance of the translucent polycrystalline alumina is 60% or higher in a wavelength range of 200 to 400 nm, and an average of a linear light transmittance of the translucent polycrystalline alumina is 15% or lower in a wavelength range of 200 to 400 nm. |
申请公布号 |
US2016005643(A1) |
申请公布日期 |
2016.01.07 |
申请号 |
US201514853011 |
申请日期 |
2015.09.14 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
Miyazawa Sugio;Iwasaki Yasunori;Takagaki Tatsuro;Ide Akiyoshi;Nakanishi Hirokazu |
分类号 |
H01L21/762;H01L21/02;C01F7/02;H01L29/06 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
1. A handle substrate of a composite substrate for a semiconductor, said handle substrate comprising a translucent polycrystalline alumina:
wherein a purity of alumina of said translucent polycrystalline alumina is 99.9% or higher; wherein an average of a total forward light transmittance of said translucent polycrystalline alumina is 60% or higher in a wavelength range of 200 to 400 nm, and wherein an average of a linear light transmittance of said translucent polycrystalline alumina is 15% or lower in a wavelength range of 200 to 400 nm. |
地址 |
Aichi-prefecture JP |