发明名称 Handle Substrate, Composite Substrate for Semiconductor, and Semiconductor Circuit Board and Method for Manufacturing the Same
摘要 It is provided a handle substrate of a composite substrate for a semiconductor. The handle substrate is composed of a translucent polycrystalline alumina. A purity of alumina of the translucent polycrystalline alumina is 99.9% or higher, an average of a total forward light transmittance of the translucent polycrystalline alumina is 60% or higher in a wavelength range of 200 to 400 nm, and an average of a linear light transmittance of the translucent polycrystalline alumina is 15% or lower in a wavelength range of 200 to 400 nm.
申请公布号 US2016005643(A1) 申请公布日期 2016.01.07
申请号 US201514853011 申请日期 2015.09.14
申请人 NGK INSULATORS, LTD. 发明人 Miyazawa Sugio;Iwasaki Yasunori;Takagaki Tatsuro;Ide Akiyoshi;Nakanishi Hirokazu
分类号 H01L21/762;H01L21/02;C01F7/02;H01L29/06 主分类号 H01L21/762
代理机构 代理人
主权项 1. A handle substrate of a composite substrate for a semiconductor, said handle substrate comprising a translucent polycrystalline alumina: wherein a purity of alumina of said translucent polycrystalline alumina is 99.9% or higher; wherein an average of a total forward light transmittance of said translucent polycrystalline alumina is 60% or higher in a wavelength range of 200 to 400 nm, and wherein an average of a linear light transmittance of said translucent polycrystalline alumina is 15% or lower in a wavelength range of 200 to 400 nm.
地址 Aichi-prefecture JP