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摘要
申请公布号
NL6617324(A)
申请公布日期
1967.06.12
申请号
NL19660017324
申请日期
1966.12.09
申请人
发明人
分类号
H01L21/00;H01L21/60;H01L23/473;H01L23/488;H01L35/08;H01L35/30
主分类号
H01L21/00
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