MICROLENS ARRAY SUBSTRATE MANUFACTURING METHOD, MICROLENS ARRAY SUBSTRATE, ELECTROOPTICAL DEVICE, AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a microlens array substrate manufacturing method and a microlens array substrate ensuring high productivity or cost effectiveness, an electrooptical device with the microlens array substrate, and an electronic device.SOLUTION: A microlens array substrate manufacturing method comprises: a process (steps S2 and S3) of forming a first layer outside of an area of a substrate on which the microlens is provided using a first material; a process (step S4) of forming a mask for forming the microlens on a side of the substrate on which the first layer is formed; a process (step S5) of etching the substrate via the mask and forming a recessed portion to serve as a lens surface of the microlens in the area of the substrate; a process (step S6) of removing the mask; a process (step S7) of burying the recessed portion with a second material and forming a second layer of the second material on the substrate; and a process (step S8) of polishing the second layer to expose the first layer.