发明名称 |
APPARATUS AND METHOD FOR SELF-REGULATING FLUID CHEMICAL DELIVERY |
摘要 |
Methods and apparatus for chemical delivery are provided herein. In some embodiments, a first reservoir holds a first volume of fluid, receives a carrier gas, and outputs the carrier gas together with vapor derived from the first volume of fluid. A second reservoir holds a second volume of fluid and is capable of delivering a part of the second volume of fluid to the first reservoir. A self-regulating tube extends from the first reservoir to a region above the second volume of fluid in the second reservoir. |
申请公布号 |
WO2016003891(A1) |
申请公布日期 |
2016.01.07 |
申请号 |
WO2015US38296 |
申请日期 |
2015.06.29 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SALINAS, MARTIN JEFF;DONG, YOUQUN;THOMPSON, DAVID;CHANG, MEI |
分类号 |
B01J4/00;B01J4/02 |
主分类号 |
B01J4/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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