POLISHING APPARATUS

摘要

This polishing apparatus (100) is characterized in being equipped with: a stage (30) for conveying an object to be polished (W); multiple polishing heads (11, 12), which hold a polishing sheet (14, 15) and are disposed in a row in the conveyance direction of the object being polished (W); a pressing mechanism (18) for pressing at least one of the polishing heads (11, 12) against the object being polished (W); and a reciprocating movement mechanism (20) for moving the pressed polishing head (11) and the other polishing head (12) in a reciprocating manner in the phase opposite to the object being polished (W) in the horizontal direction. Provided thereby is a polishing apparatus capable of limiting vibrational phenomena with an inexpensive configuration that does not use a counterweight member, and efficiently executing multiple polishing steps.