| 摘要 |
An apparatus is described for determining surface topography of a three-dimensional structure. The apparatus can include a probe (90) and an illumination unit (28,32,34,38) configured to output a plurality of light beams (36). In many embodiments, the apparatus includes a light focusing assembly (42,44). The light focusing assembly can receive and focus each of a plurality of light beams to a respective external focal point. The light focusing assembly can be configured to overlap the plurality of light beams within a focus changing assembly (224,234) in order to move the external focal points along a direction of propagation of the light beams. The apparatus can include a detector (60) having an array of sensing elements configured to measure a characteristic of each of a plurality of light beams returning from the illuminated spots and a processor (24) coupled to the detector and configured to generate data representative of topography of the structure based on the measured characteristic. |
