| 摘要 |
The invention relates to an optical element (OE) made of fused silica, which has an inner region (FP) that is continuous in a thickness direction (z), which inner region is surrounded by a circumferential edge region (BA) that is continuous in the thickness direction (z), wherein a hydrogen content ( [H2] ) in the circumferential edge region (BA) is less than a hydrogen content ( [H2] ) in the inner region (FP). The invention also relates to an optical manipulator with such an optical element (OE), a projection lens with at least one such optical manipulator and a projection exposure apparatus with such a projection lens. |
