发明名称 BOAT
摘要 A boat for loading and storing a plurality of substrates therein is disclosed. The boat, according to the present invention, enables the weight of a substrate supported on support bars to be transferred to a support member and be transferred to a front plate, a rear plate, a left side plate, and a right side plate through the support member such that the weight can be transferred to the whole area of the boat. Therefore, since the weight of a substrate is applied to the whole area of the boat, deformation of the boat can be prevented. In addition, a main support plate for supporting the substrate is fixedly coupled, and an auxiliary support plate for supporting a substrate smaller than the substrate supported on the main support plate is detachably coupled to the main support plate. Accordingly, a substrate can be supported on the main support plate or the auxiliary support plate according to the size of the substrate. That is, since various types of substrates having different sizes can be supported and used with one boat, the cost thereof is reduced.
申请公布号 WO2016002978(A1) 申请公布日期 2016.01.07
申请号 WO2014KR05786 申请日期 2014.06.30
申请人 TERASEMICON CORPORATION 发明人 LEE, BYUNG IL;LEE, YOUNG HO;HUR, KWAN SUN
分类号 B65D85/38;H01L21/22 主分类号 B65D85/38
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