METHOD OF FABRICATING A MERGED P-N JUNCTION AND SCHOTTKY DIODE WITH REGROWN GALLIUM NITRIDE LAYER

摘要

A method for fabricating a merged p-i-n Schottky (MPS) diode in gallium nitride (GaN) based materials includes providing an n-type GaN-based substrate having a first surface and a second surface. The method also includes forming an n-type GaN-based epitaxial layer coupled to the first surface of the n-type GaN-based substrate, and forming a p-type GaN-based epitaxial layer coupled to the n-type GaN-based epitaxial layer. The method further includes removing portions of the p-type GaN-based epitaxial layer to form a plurality of dopant sources, and regrowing a GaN-based epitaxial layer including n-type material in regions overlying portions of the n-type GaN-based epitaxial layer, and p-type material in regions overlying the plurality of dopant sources. The method also includes forming a first metallic structure electrically coupled to the regrown GaN-based epitaxial layer.

主权项

1. A method for fabricating a merged p-i-n Schottky (MPS) diode in gallium nitride (GaN) based materials, the method comprising:
providing an n-type GaN-based substrate having a first surface and a second surface; forming an n-type GaN-based epitaxial layer coupled to the first surface of the n-type GaN-based substrate; forming a p-type GaN-based epitaxial layer coupled to the n-type GaN-based epitaxial layer; removing portions of the p-type GaN-based epitaxial layer to form a plurality of dopant sources; regrowing a GaN-based epitaxial layer including n-type material in regions overlying portions of the n-type GaN-based epitaxial layer and p-type material in regions overlying the plurality of dopant sources; and forming a first metallic structure electrically coupled to the regrown GaN-based epitaxial layer.