TOOL FOR MANIPULATING SUBSTRATES, MANIPULATION METHOD AND EPITAXIAL REACTOR

摘要

The tool (1 ) for manipulating substrates in an epitaxial reactor comprises an arm (2), a gripping disc (3) and a ball joint (4); said gripping disc (3) has a seat (5) on a lower face thereof for receiving a substrate (6) to be manipulated; said gripping disc (3) is mounted on the arm (2) through said ball joint (4) placed centrally with respect to said gripping disc (3); said gripping disc (3) is shaped so as to come into contact only with the upper edge of said substrate (6) to be manipulated; said gripping disc (3) has two degrees of freedom of rotational movement with respect to said arm (1 ) to allow adapting to the position of a substrate in a pocket of a susceptor of an epitaxial reactor.