APPARATUS FOR MEASURING THICKNESS OF DEPOSITION

摘要

The present invention relates to an apparatus to measure a thickness of a deposition, in accordance with one aspect of the present invention, an apparatus to measure the thickness of the deposition comprising: a sensor unit provided with a quartz vibrator, measuring an amount of deposition in accordance with a change in frequency according to the deposition of the evaporated particles of the quartz vibrator; a sensor tube which guides a flow of the evaporated particles toward the quartz vibrator; a chopper interposed between the quartz vibrator and the sensor tube, regulating the flow of the evaporated particles towards the quartz vibrator in accordance with a rotation of the chopper; and a wiper unit which eliminates parasitic deposits parasitically deposited on the chopper and then separated from the chopper, covering an end portion of the sensor tube.