| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing trisilylamine.SOLUTION: In one aspect, the method comprises: providing a reaction mixture of trisilylamine and monochlorosilane into a reactor, where the reaction mixture is at a temperature and pressure sufficient to provide trisilylamine in a liquid phase, where the reaction mixture is substantially free of an added solvent; contacting the reaction mixture with ammonia to provide a crude mixture comprising trisilylamine and an ammonium chloride solid, where monochlorosilane is in stoichiometric excess in relation to ammonia; purifying the crude mixture to provide trisilylamine, where the trisilylamine is produced at a purity level of 90% or greater; and optionally removing the ammonium chloride solid from the reactor. |
