SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING PROGRAM

摘要

PROBLEM TO BE SOLVED: To facilitate setting, change and management of a process recipe.SOLUTION: In a substrate processing apparatus including a control section for processing a substrate according to a processing procedure set in a process recipe, the process recipe links the processing procedure to a plurality of partial recipes unitized for each function, and the control section processes the substrate according to a processing procedure set in the plurality of partial recipes thus linked.