| 主权项 |
1. A device comprising an electrostatic membrane-based venturi pump system, wherein the electrostatic membrane-based venturi pump system comprises an array of electrostatic membrane pump transducers, wherein
(a) the array of electrostatic membrane pump transducers comprise a first set comprising one or more first electrostatic membrane pump transducers, (b) the array of electrostatic membrane pump transducers comprise a second set comprising one or more second electrostatic membrane pump transducers, and (c) each of the electrostatic membrane pump transducers in the array of electrostatic membrane pump transducers comprises
(i) a chamber,(ii) an electrically conductive solid stator having an electrically conductive solid stator hole, wherein (A) the electrically conductive solid stator bounds part of the chamber and (B) is operable to allow fluid to flow into and out of the chamber through the electrically conductive solid stator hole,(iii) a venturi exit plate having a venturi exit plate hole, wherein (A) the venturi exit plate is located outside the chamber and (B) the venturi exit plate is operable to allow the fluid to flow out of the electrostatic membrane pump transducer through the venturi exit plate hole,(iv) a spacer located between the electrically conductive solid stator and the venturi exit plate to create a space therebetween,(v) a venturi channel located outside the first chamber, wherein the venturi channel is operable to allow fluid to flow from outside the first electrostatic membrane pump transducer to the space between the electrically conductive solid stator and the venturi exit plate and exit through the venturi exit plate hole,(vi) a first electrically conductive perforated stator located within the chamber, wherein (A) the first electrically conductive perforated stator has at least one perforation, and (B) the first electrically conductive perforated stator is operable to allow the fluid to flow therethrough, and(vii) a first electrically conductive membrane located within the chamber, wherein the first electrically conductive membrane is operable to (A) deflect away from the electrically conductive perforated stator to flow fluid out of the chamber through the electrically conductive solid stator hole and (B) deflect toward the electrically conductive perforated stator to flow fluid into the chamber through the electrically conductive solid stator hole, and whereinthe one or more first electrostatic membrane pump transducers of the first set are out of phase with respect to the one or more second electrostatic membrane pump transducers of the second set whereby, (A) when the one or more first electrostatic membrane pump transducers of the first set are flowing the fluid out of the chambers through the electrically conductive solid stator holes, the one or more second electrostatic membrane pump transducers of the second set are flowing the fluid into the chambers through the electrically conductive solid stator holes and (B) visa versa. |
