| 摘要 |
According to an embodiment of the present invention, a substrate transferring arm and a substrate transferring apparatus including the same prevent a substrate from sliding and increase a process speed of the substrate, thereby improving productivity. The substrate transferring arm comprises: a body; and a plurality of substrate support units coupled to the body. The substrate support units include a substrate holder and a substrate support pin, and an inner side of the substrate holder includes an inclined portion. |
