| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystal layer and a function element which, in a group 13 element nitride crystal layer, obtains desired conductivity and can suppress functional heterogeneity due to heterogeneity in the conductivity of the crystal layer.SOLUTION: On the surface 3a of a crystal layer 3 made of group 13 element nitride, a first region 8, and a second region 9 having carrier concentration and defect density which are higher than those of the first region 8 are present. The ratio (second region/first region) of a product of the carrier concentration and the defect density of the second region 9 to the product of the carrier concentration and the defect density of the first region 8 is 10 or more and 1000 or less. |
