| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration sensor unit that helps suppress the cost required for a vibration sensor used for detecting abnormality in a ball screw device, a support bearing, and a linear motion guide device composing a linear motion table device.SOLUTION: The vibration sensor unit comprises: a housing 2 provided with a first magnetic part formed from a magnetic material; a holding member 4 provided with a second magnetic part formed from a magnetic material; a vibration sensor 5, fixed to the holding member 4, for detecting vibration in a prescribed direction; and a magnet 6 fixed to the holding member 4, the vibration sensor unit further having a rotary part 8 rotatably accommodated in the housing 2 and an electric magnet 7 accommodated in the housing 2 and disposed so that the rotary part 8 enters within a magnetic field. The vibration sensor unit is switchable between a first state in which the magnet 6 and the first magnetic part pull against each other and the rotary part 8 is fixed in place, and a second state in which the electric magnet 7 and the magnet 6 repels each other due to the application of a voltage to the electric magnet 7, the rotary part 8 rotates about 90° from the first state, the second magnetic part and the electric magnet 7 pull against each other, and the rotary part 8 is fixed in place. |
