| 摘要 |
PROBLEM TO BE SOLVED: To provide a multipoint distance measuring device capable of measuring distances to a plurality of points on an object to be measured with high accuracy and in a short time without depending on the shape of the object to be measured, and a shape measuring apparatus.SOLUTION: A Fabry-Perot etalon generates special light having a repetition frequency from a broad spectrum. The special light is divided into reference light and distance measuring light. The distance measuring light is divided into a plurality of light beams. The plurality of light beams are emitted toward a plurality of points of an object to be measured from a plurality of light incidence/emission parts, and the light beams regularly reflected at the plurality of points are respectively made incident to the plurality of light incidence/emission parts. Optical interference signals are detected between the reference light and the light beams for each of the plurality of points. Distances are calculated between the plurality of light incidence/emission parts and the plurality of individual points. When a pulse interval of the special light is represented as D and an arbitrary natural number is represented as n, light path lengths of the light beams at the plurality of light incidence/emission parts are sequentially lengthened n D by n D. When a maximum value of a positional deviation amount in incidence/emission directions of adjacent two points of the plurality of points is represented as G, the etalon satisfies D>G. |
