NANOFABRICATION OF NANOPOROUS ARRAYS

摘要

An array having nanopores is produced by coating a thin layer of metal or other material onto a substrate and creating a mask on the metal or other material by combining a first polymer and a second polymer. The first polymer self-assembles into nanodomains of the first polymer in the second polymer resulting in the formation of a uniform hexagonal pattern of the first polymer nanodomains in the second polymer over the entire surface of the metal or other material. The nanodomains are removed by etching to form nano-voids that extend through the polymer layer. Nanopores are created in the metal or other material layer by ion beam milling the metal through the nano-voids to produce nano-pores that extend through the metal or other material creating an array having nanopores.

主权项

1. A nanolithography method for creating an array, comprising the steps of:
providing a substrate having surface; coating a layer of material on said surface of said substrate providing a material surface; forming a mask on said material surface by combining a first polymer and a second polymer to form self-assembled nanodomains of said first polymer in said second polymer and removing said nanodomains to form nano-voids in said mask; and ion beam milling said material through said nano-voids in said mask producing nano-pores in said material creating the array.