发明名称 |
ROTATION MECHANISM AND FILM THICKNESS MONITOR INCLUDING SAME |
摘要 |
The present invention relates to a rotation mechanism which is provided with: a motor (2); an output shaft (3) powered by the motor (2) to rotationally drive a rotationally driven body (7); and a roller bearing (6) fitted over the output shaft (3) to support the output shaft (3), the mechanism being adapted such that a rotation drive body (4) is disposed at the top of the output shaft (3) so that the rotation drive body (4) is coupled to the rotationally driven body (7) via a rotational force transfer means (5); and an outer ring (61) of the roller bearing is fitted into grooves (51a, 51b) provided in a rotational force transfer means (8). This allows the present invention to implement a structure which makes the roller bearing resistant to fatigue and thereby achieve a long service life. |
申请公布号 |
WO2016002122(A1) |
申请公布日期 |
2016.01.07 |
申请号 |
WO2015JP02463 |
申请日期 |
2015.05.15 |
申请人 |
ULVAC, INC. |
发明人 |
KOTAKA, MANABU;FURUSE, HARUKUNI;MAEDA, AKIHIRO |
分类号 |
F16C35/067;F16C19/06 |
主分类号 |
F16C35/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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