| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma source or a PECVD source and a process, consuming less energy during operation, compact with high coating efficiencies, and capable of creating a uniform and stable plasma greater than 0.5 meters in length, thereby achieving large area coating.SOLUTION: An AC power source is connected to an electrode including a first electron emitting surface and a second electron emitting surface which are separated by a space including gas, and voltages which are out of phase with one another are supplied to the first and second electron emitting surfaces. Thus, secondary electron current flows between the electron emitting surfaces and a plasma is formed between the electron emitting surfaces. The plasma is linear, has a length of at least about 0.5 meters, and is almost uniformly formed over the plasma length in a state where closed circuit electron drift does not exist substantially. |
