| 摘要 |
The invention relates to a device for generating a vapor for a CVD or PVD apparatus, with at least two thermal transfer bodies arranged successively in the direction of flow of a carrier gas and having thermal transfer surfaces, each of which can be heated to a thermal transfer temperature, with an inlet pipe (4) for feeding an aerosol to one of the thermal transfer bodies for vaporization of the aerosol by bringing the aerosol particles into contact with the thermal transfer surfaces. A provision is made that at least one of the thermal transfer bodies has an opening in which an inlet pipe (4) is located, the inlet pipe (4) having a first flow channel (23) for feeding the aerosol in and a second flow channel (24) for feeding a carrier gas in, gas passage openings (29, 30) being provided through which the carrier gas can flow out of the second flow channel (24) into the first flow channel (23), and a provision particularly being made that the second flow channel (24) is sealed in the area of the mouth (4′) of the inlet pipe. |
| 主权项 |
1. A device for generating a vapor for a CVD or PVD apparatus, with at least two thermal transfer bodies (1, 2, 3) arranged successively in a housing (12) in the direction of flow of a carrier gas and having thermal transfer surfaces, each of which can be heated to a thermal transfer temperature, with an inlet pipe (4, 5) for feeding an aerosol to one of the thermal transfer bodies (2, 3) for vaporization of the aerosol by bringing the aerosol particles into contact with the thermal transfer surfaces, wherein at least one of the thermal transfer bodies (1, 2, 3) has an opening (6, 7, 8) in which an inlet pipe (4, 5) is located, characterized in that the thermal transfer bodies (1, 2, 3) can be heated to different temperatures, an upstream thermal transfer body (1) first in the direction of flow being a preheating body for the carrier gas, which can be fed through a carrier gas feed line (11) upstream from the first thermal transfer body into the housing (12), in which housing (12) the thermal transfer bodies (1, 2, 3) are arranged successively in the direction of flow such that the carrier gas flows through all of the thermal transfer bodies (1, 2, 3) and either the inlet pipe (4, 5) is guided through the opening (6, 7, 8) of a thermal transfer body (1, 2, 3) and leads into a spacing gap (9, 10) between the first and the second thermal transfer bodies (1, 2; 2,3) or the mouth (4′ 5′) of the inlet pipe (4, 5) is arranged in a thermal transfer body (2, 3). |
