发明名称 SOLUTION CONTAINMENT DURING BUFFER LAYER DEPOSITION
摘要 Improved methods and apparatus for forming thin-film layers of chalcogenide on a substrate web. Solutions containing the reactants for the chalcogenide layer may be contained substantially to the front surface of the web, controlling the boundaries of the reaction and avoiding undesired deposition of chalcogenide upon the back side of the web.
申请公布号 WO2015092543(A3) 申请公布日期 2016.01.07
申请号 WO2014IB03099 申请日期 2014.12.15
申请人 HANERGY HI-TECH POWER (HK) LIMITED;BRITT, JEFFREY, S. 发明人 BRITT, JEFFREY, S.;ALBRIGHT, SCOT;SCHOOP, URS;STOSS, WALTER;VEREBELYI, DARREN
分类号 B05D1/02;H01L21/00 主分类号 B05D1/02
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