| 主权项 |
1. A micro-optical electromechanical scanning device, comprising:
a body; a mirror element; and a spring structure configured to flexibly support the mirror element to the body, wherein the mirror element includes a mirror comprising a planar reflecting surface on a mirror base part, a direction of a plane of the mirror at rest being a first direction, wherein the body at least partly circumscribes the mirror element, and is separated from the mirror element at least by a gap, wherein the mirror element includes two or more pedestals, wherein the spring structure includes bending springs, wherein each bending spring connects to the body through a first connection point and to one pedestal through a second connection point, wherein each pedestal extends between the second connection point and a third connection point opposite the mirror in the mirror base part, wherein each pedestal is configured to rigidly maintain a non-zero distance between the second connection point and the third connection point in a second direction perpendicular to the first direction, and wherein the spring structure includes piezoelectric transducers configured to induce in each of the bending springs a displacement that moves the second connection point of the bending spring at least in the direction perpendicular to the first direction. |
