| 摘要 |
The present invention relates to a method for measuring properties of a substrate using an antenna. According to the present invention, the method for measuring properties of a substrate using an antenna comprises: a step of preparing a material sample of a target substrate; a step of using an antenna fabricated on a substrate for substrate properties measurement to measure distribution parameters of the material sample; a step of using a predetermined antenna simulation model to calculate the distribution parameters of the material sample; a step of comparing/analyzing the two sets of the distribution parameters obtained by measurement and calculation through an optimization algorithm (process) for error minimization; and a step of extracting a material constant of the material sample based on the comparison/analysis. According to the present invention, a comprehensive minimization value is found between an optimization variable and an error function based on an intelligently selected data point to reduce data collection and calculation efforts, thereby solving complex nonlinear problems to increase precision of properties measurement. |
