HIGH EFFICIENCY BUFFER STOCKER

摘要

A high-efficiency buffer stocker is disclosed. The buffer stocker includes an overhead transport track for supporting overhead transport vehicles carrying wafer containers and at least one conveyor system or conveyor belt provided beneath the overhead transport track for receiving the wafer containers from the overhead transport vehicles on the overhead transport track. The buffer stocker is capable of absorbing the excessive flow of wafer containers between a processing tool and a stocker, for example, to facilitate the orderly and efficient flow of wafers between sequential process tools in a semiconductor fabrication facility, for example.

主权项

1. A buffer stocker system comprising:
an overhead transport track supporting a plurality of movable overhead transport vehicles each configured for carrying a container, the overhead transport track comprising at least a first position and a second position; a first elongated conveyor belt at a first elevation having a first end and a second end, the first end corresponding to the first position of the overhead transport track; and a second elongated conveyor belt at a second elevation having a first end and a second end, the first end corresponding to the second position of the overhead transport track, wherein the second elongated conveyor belt is positioned vertically directly beneath the first elongated conveyor belt, wherein the first elongated conveyor belt and the second elongated conveyor belt are overlapping in plan view, wherein the first end of the second elongated conveyor belt extends longitudinally beyond the first end of the first elongated conveyor belt, and wherein the first elongated conveyor belt and the second elongated conveyor belt are each configured to receive a container from one of the plurality of moveable overhead transport vehicles at respective first or second positions.