发明名称 METHODS AND APPARATUS TO SUPPORT FABRICATORS WITH COGNITIVE COMPUTING
摘要 The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools in at least a vertical dimension relative to each other. The support aspect may include a cognitive computing system.
申请公布号 US2016004243(A1) 申请公布日期 2016.01.07
申请号 US201514852239 申请日期 2015.09.11
申请人 Flitsch Frederick A. 发明人 Flitsch Frederick A.
分类号 G05B19/19;G05B19/402 主分类号 G05B19/19
代理机构 代理人
主权项 1. A method of producing products; said method comprising: fixing two or more processing tools into position in a fab wherein the two or more processing tools at least a vertical dimension relative to each other, wherein the two or more processing tools are peripherally located with respect to a fab workproduct transportation region comprising a first boundary and a second boundary, and wherein each of the processing tools is capable of independent operation, and wherein each of the processing tools is removable in an unobstructed fashion relative to other processing tools; connecting the fab and the two or more processing tools to a cognitive computing system; removing a workproduct from a workproduct carrier into a first tool port; performing a first process on the workproduct in the first tool; containing the workproduct in the workproduct carrier subsequent to the performance of the first process; transporting the workproduct carrier to a second tool port within the fab workproduct transportation region; exchanging a sensor information and a logistic information from the second tool to the cognitive computing system; removing the workproduct from the workproduct carrier into the second tool port; and performing a second process on the workproduct in the second tool.
地址 New Windsor NY US