发明名称 OPTICAL-COHERENCE-TOMOGRAPHY APPARATUS AND SURFACE-EMITTING LASER
摘要 An optical-coherence-tomography apparatus includes a light-source unit configured to emit light while changing a wavelength of the light; an optical interferometric system configured to split the light from the light-source unit into illuminating light to be applied to an object and reference light, and to generate interfering light from the illuminating light reflected by the object and the reference light; a photodetection unit configured to receive the interfering light; and an information-acquiring unit configured to acquire information on the object from the interfering light received by the photodetection unit. The light-source unit performs wavelength sweep by displacing a movable portion with an electrostatic force generated with the application of a voltage. The optical-coherence-tomography apparatus further includes a pull-in-detection unit configured to detect whether or not a pull-in effect is occurring on the movable portion of the light-source unit.
申请公布号 WO2016002160(A1) 申请公布日期 2016.01.07
申请号 WO2015JP03108 申请日期 2015.06.22
申请人 CANON KABUSHIKI KAISHA 发明人 HORI, YUICHIRO
分类号 G01N21/17;G01N21/01;H01S5/022;H01S5/183 主分类号 G01N21/17
代理机构 代理人
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