发明名称 METHOD FOR PRODUCING A COMPOSITE OF A PERFORATED SUBSTRATE AND A POLYMER MEMBRANE FOR MICROSYSTEMS ENGINEERING
摘要 A method is described for producing a composite (1) of a perforated substrate (3) and a polymer membrane (5). A polymer membrane (5) is realised on a provided flexible carrier substrate (7), for example by spin coating, dip coating or spray coating. The flexibility of the flexible carrier substrate in this case is to be greater than that of the perforated substrate to be provided with the polymer membrane, and such that the flexible carrier substrate can be bent reversibly in bend radii of less than 5 cm. The polymer membrane (5) is then bonded, by a surface (9) that is opposite to the carrier substrate (7), on to a surface of the perforated substrate (3) that is provided with holes (11). Finally, the polymer membrane (5) is separated from the carrier substrate (7), for example by being drawn off successively, starting from a side, while remaining on the surface of the perforated substrate (3). The polymer membrane (5) may be composed, for example, of polydimethylsiloxane, which may have only a weak adhesion to the flexible carrier substrate (7) and may therefore easily be separated from the latter. The polymer membrane (5) may be very thin, for example less than 50 μm. By means of the method, it is possible to produce a large-area composite (1) of a perforated substrate (3) and a polymer membrane (5) that can be used for a variety of purposes, in particular in microsystems engineering, for example for a braille display.
申请公布号 WO2016001131(A1) 申请公布日期 2016.01.07
申请号 WO2015EP64687 申请日期 2015.06.29
申请人 HOCHSCHULE FURTWANGEN 发明人 FILBERT, ALEXANDER;RUI, ZHU
分类号 B32B38/10;B01D69/10;B32B3/26;G09B21/00 主分类号 B32B38/10
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