CONFIGURATION AND METHOD TO GENERATE SADDLE JUNCTION ELECTRIC FIELD IN EDGE TERMINATION

摘要

This invention discloses a semiconductor power device disposed in a semiconductor substrate and having an active cell area and an edge termination area the edge termination area wherein the edge termination area comprises a superjunction structure having doped semiconductor columns of alternating conductivity types with a charge imbalance between the doped semiconductor columns to generate a saddle junction electric field in the edge termination.

主权项

1. A semiconductor power device disposed in a semiconductor substrate and having an active cell area and an edge termination area wherein:
the edge termination area comprises a superjunction structure having doped semiconductor columns of alternating conductivity types wherein the doped semiconductor columns extends along a slanted direction in the edge termination area.