| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method capable of improving accuracy of defect inspection using an image.SOLUTION: An inspection device includes a luminaire for irradiating an inspection object with inspection light, an image acquisition device for acquiring an inspection image of the inspection object irradiated with inspection light, and an image processing device for generating a processed image in which a non-defective part and a defective part are discriminated each other, from the inspection image in which the defective part which is a detection object and the non-defective part which is not a detection object are included discriminably and discrimination between the defective part and the non-defective part is difficult. |
