OPEN TOP BACK PLATE OPTICAL MICROPHONE

摘要

A micro-electro-mechanical system (MEMS) optical sensor and method of manufacturing a MEMS optical sensor. The MEMS optical sensor may be a MEMS optical microphone including a compliant membrane configured to vibrate in response to an acoustic wave, the compliant membrane having a grating suspended therein. The optical sensor further including a back plate positioned above the compliant membrane, the back plate having a reflector suspended within a center portion of the back plate and aligned with the grating. The optical sensor further including a light emitter positioned below the compliant membrane and configured to transmit a laser light toward the grating and the reflector. The optical sensor also including a light detector configured to detect an interference pattern of the laser light after reflection from the reflector, wherein the interference pattern is indicative of an acoustic vibration of the compliant membrane. Other embodiments are also described and claimed.

主权项

1. A micro-electro-mechanical system (MEMS) optical microphone comprising:
a substrate; a compliant bottom plate positioned above the substrate, the bottom plate configured to vibrate in response to an acoustic wave and having a grating suspended therein; a rigid top plate positioned above the bottom plate, the top plate having a reflector suspended therein; a light emitter positioned on the substrate, the light emitter configured to transmit a laser light toward the grating and the reflector; and a light detector positioned on the substrate, the light detector configured to detect an interference pattern of the laser light after reflection from the reflector, wherein the interference pattern is indicative of an acoustic vibration of the bottom plate.